Scope

• surface physics and chemistry (i.e. understanding the chemical and physical nature of MEMS/NEMS surfaces, interfaces, the role of surfaces and materials interfaces during processing, device operation, and long-term reliability);
• device and reliability physics (i.e. understanding the physical basis for operation and failure in all types of MEMS/NEMS as well as life-time projections, scientific studies of fatigue of materials and interfaces at micro- and nano-scales);
• modeling (i.e. developing new methods for simulating MEMS/NEMS performance);
• understanding fundamental mechanisms of MEMS actuator and devices for sensing various agents and development new types of sensors.
• Applications, including RF MEMS, optical MEMS, switches, sensors, and other MEMS devices
• Micro-/nano-fabrication, processing techniques, materials and technologies used in surface and bulk micromachining
• MEMS/NEMS characterization