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Scope
- surface physics and chemistry (i.e. understanding
the chemical and physical nature of MEMS/NEMS surfaces,
interfaces, the role of surfaces and materials interfaces
during processing, device operation, and long-term
reliability);
- device and reliability physics (i.e. understanding
the physical basis for operation and failure in all
types of MEMS/NEMS as well as life-time projections,
scientific studies of fatigue of materials and interfaces
at micro- and nano-scales);
- modeling (i.e. developing new methods for simulating
MEMS/NEMS performance);
- understanding fundamental mechanisms of MEMS actuator
and devices for sensing various agents and development
new types of sensors.
- Applications, including RF MEMS, optical MEMS,
switches, sensors, and other MEMS devices
- Micro-/nano-fabrication, processing techniques,
materials and technologies used in surface and bulk
micromachining
- MEMS/NEMS characterization
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